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Calibration

Calibrating Z

Rev. D Dimension 3100 Manual 335

17.8.4 Correct Z Sensitivity

If the depth of the pit on the 10µm silicon calibration reference deviates signiﬁcantly from 200 nm,

correct the Z sensitivity parameter in the Z Calibration dialog box.

1. Transfer to the Z Calibration dialog box by selecting Realtime > Microscope > Calibrate

> Z.

2. Divide the actual depth of features (200nm for the 10µm calibration reference) by the

measured depth (indicated in Depth analysis by the Peak to Peak value):

3. Multiply this quotient by the Z sensitivity value in the Z Calibration dialog box, and replace

the former Z sensitivity value with the new result.

4. Click on OK to enter the new Z sensitivity value.

Note: The numerator value above (200nm) is for Veeco 10µm silicon reference. For

other calibration references, set the numerator equal to the depth of features

measured by Depth analysis. Ideally, calibration references should have

features with heights comparable to those being imaged and measured on

samples.

17.8.5 Recheck Z-axis Measuring Accuracy

After executing the steps above, recheck the Z-axis measuring accuracy of the SPM by repeating

the steps outlined above until you obtain accuracy of 1 to 2%.

17.8.6 Calculate Retracted and Extended Offset Deratings

Piezoelectric materials exhibit greater sensitivity at higher voltages. In the steps outlined above, the

Z-axis calibrates while scanning near the middle of its voltage range (i.e., Z Center Position ~ 0

V). In this section, you will calibrate the Z-axis piezo while extended and retracted to offset the

increased sensitivity.

1. Select Engage under the Motor pop-down menu or click on the Engage icon.

2. Use the Realtime > Motor > Tip Up button until the Z Center Position reads 100V (±5V).

Note: By using the motor to move the tip up, the feedback loop forces the Z-axis

piezo to extend to continue its tracking of the surface.

3. Refer to the steps above (Section 17.8.1 - Section 17.8.3) to determine the measured depth of

the calibration standard with a 100V Z Center Position.

200nm

Peakto Peak value

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