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Calibration

Fine-tuning for X-Y Calibration

326 Dimension 3100 Manual Rev. D

17.7 Fine-tuning for X-Y Calibration

Fine-tuning is usually performed at two Scan size settings: 150V and 440V. Both horizontal and

vertical measurements of sample features are made, then compared with actual distances. Based

upon this comparison, computer parameters are ﬁne-tuned. To ﬁne-tune your SPM for maximum

X-Y measuring accuracy, review the procedure below.

17.7.1 Prepare System for Fine-tuning

1. Set the Scan size parameter on the Scan Controls panel to the maximum value (440V).

2. Verify that the Scan angle is set at 0.00 degrees.

3. Mount a calibration reference in the SPM and begin imaging. This may consist of a generic

(e.g., 10-micron, silicon) reference, or a sample having features of known dimensions (e.g.,

grating, etc.).

4. Optimize the image quality.

Note: Your calibration and ﬁne-tuning procedures are no better than the procedures

and references used. Choose both carefully.

17.7.2 Measure Horizontally at 440V Scan Size

1. Set the Scan size parameter on the Scan Controls panel to the maximum value (440V).

2. Verify that the Scan angle is set to 0.00 degrees.

3. Engage the surface.

4. Select two widely-spaced features on the sample image of known separation. Use the mouse

to draw a horizontal line between them (see Figure 17.7a). (For example, on a 10µm silicon

reference, draw the line from the left side of one pit to the left side of another pit as far away

as possible.) The screen will display the measured distance between pits next to the line.

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Dell 3100 Spezifikationen Seite 346