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TappingMode AFM

Basic TappingMode AFM Operation

136 Dimension 3100 Manual Rev. D

Automatic Tuning

For most purposes, the Auto Tune function will sufﬁce.

•Verify the starting parameters. The nominal resonant frequency of a probe can be found

on the probe box label. Ensure the start and end frequencies correlate with this value.

• Click Auto Tune. The computer and controller begin automatic tuning (see Figure

9.2a).

Figure 9.2a Auto Tune Control Panel

Manual Cantilever Tuning

With Force Modulation or Fluid Tapping applications, it may be useful to tune the cantilever

manually.

Note: More than one type of cantilever exists. Cantilevers can have different

dimensions and different resonant frequencies. Certain parameter values,

particularly the center frequency and the sweep width used in the following

example, apply to a particular cantilever type. In the following example,

nominal parameter values will vary depending on the actual cantilever used.

1. In the Cantilever Tune panel, set the Drive frequency parameter to a value near the center

of the resonant frequencies range specified for the wafer. For example, if the frequency range

is specified as 240—420 KHz, select a drive frequency of 330 KHz.

2. Set the Drive amplitude to 200 mV.

3. Set the Sweep Width to the same value as the Center Frequency.

4. The Sweep Width must be large enough to cover the frequency range specified for the

wafer.

5. Zero the Setpoint.

6. Set the Amplitude limit to 2.5V.

7. Center the peak on the frequency sweep plot shown on the display monitor using the Zoom

In and Offset commands after identifying the maximum amplitude peak with the lowest

frequency in the frequency response plot.

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Dell 3100 Spezifikationen Seite 156