
System Overview
System Overview
2 Dimension 3100 Manual Rev. D
• Sample Size & Handling: Section 1.4
• Facilities Specifications: Section 1.5
• Applications: Section 1.6
• Maintenance and Troubleshooting: Section 1.7
1.1 System Overview
There are two typical configurations of the Dimension 3100 Scanning Probe Microscope (see
Chapter 3 for detailed information).
•VT-103-3K with ELCON
•VT-102
The configurations provide options for acoustic and mechanical vibration isolation, as well as
various options for positioning control station components. The features outlined below apply to all
configurations.
1.1.1 Dimension 3100 SPM Features
Enhanced Motorized Positioning Stage
• Inspectable Area 120mm x 100mm
• Resolution: 2µm
• Unidirectional Repeatability: 3µm typical, 10µm maximum
• Bidirectional Repeatability: 4µm for x-axis, 6µm for y-axis typical for point to point
motion
Integrated Dimension 3100 Controller
The Dimension 3100 controller integrates the illuminator, power supply, and air and vacuum
pumps.
Optical Microscope
The optical microscope now includes a computer-controlled illuminator for easier optical focusing
and zooming.
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