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Seitenansicht 17
List of Figures
xviii Dimension 3100 Manual Rev. D
Figure 16.2a Comparison of Attractive and Repulsive Forces . . . . . . . . . . 275
Figure 16.2b Diagram of Extender Electronics Module for EFM . . . . . . . 276
Figure 16.2c Microscope Backplane. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 277
Figure 16.2d Toggle Switches on Extender Electronics Module . . . . . . . . 279
Figure 16.2e Normal Jumper Configuration . . . . . . . . . . . . . . . . . . . . . . . . 280
Figure 16.2f Jumper Configuration for Application of Analog 2 Voltage to Tip281
Figure 16.2g Jumper Configuration (Application of Analog 2 Voltage to Sample)
282
Figure 16.2h Jumper Configuration for Applying External Voltage to Tip. 283
Figure 16.2i Jumper Configuration for Applying External Voltage to Sample284
Figure 16.2j Normal Jumper Configuration with Extender Electronics Module285
Figure 16.2k Jumper Configuration for Application of Voltage to Tip . . . . 286
Figure 16.2l Jumper Configuration for Application of Voltage to Sample . 287
Figure 16.2m Jumper Configuration for Applying External Voltage to Tip 288
Figure 16.2n Jumper Configuration for Applying External Voltage to Sample289
Figure 16.2o Phase Detection Cantilever Tune
(Extender Electronics Module Installed) . . . . . . . . . . . 291
Figure 16.2p Shift In Phase at Fixed Drive Frequency . . . . . . . . . . . . . . . . 291
Figure 16.2q Shift In Amplitude at Fixed Drive Frequency . . . . . . . . . . . . 293
Figure 16.2r Amplitude Detection Cantilever Tune . . . . . . . . . . . . . . . . . . 294
Figure 16.4a Simplified Block Diagram of Basic Extender Module in Surface
Potential Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 297
Figure 16.5a Normal Jumper Configuration with Extender Electronics Module299
Figure 16.5b Jumper Configuration for Application of Voltage to Tip . . . . 299
Figure 16.5c Jumper Configuration for Application of Voltage to Sample. 300
Figure 16.6a Toggle Switches on Back of Basic Extender Module . . . . . . 301
Chapter 17 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 305
Figure 17.1a Scanner Crystal Voltage and Photodiode Voltage . . . . . . . . . 309
Figure 17.1b Scanner Sensitivity Curve . . . . . . . . . . . . . . . . . . . . . . . . . . . 310
Figure 17.1c Effect of Nonlinearity and Hysteresis . . . . . . . . . . . . . . . . . . 310
Figure 17.1d Scanner Voltage and Movement . . . . . . . . . . . . . . . . . . . . . . 311
Figure 17.1e Silicon Calibration Reference . . . . . . . . . . . . . . . . . . . . . . . . 312
Figure 17.2a 0 Degrees Scan Angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 313
Figure 17.3a Non-Orthogonal and Corrected, Orthogonal Image . . . . . . . 314
Figure 17.4a Fast Scan Linearization: Mag0 . . . . . . . . . . . . . . . . . . . . . . . 317
Figure 17.4b X Scan Linearization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 317
Figure 17.4c Y Scan Linearization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 318
Figure 17.5a Capture Calibration Prompt . . . . . . . . . . . . . . . . . . . . . . . . . . 321
Figure 17.5b Capture Control Prompt. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 322
Figure 17.5c Improved Calibration Image . . . . . . . . . . . . . . . . . . . . . . . . . 322
Figure 17.6a X-Y Piezo Calibration Prompt. . . . . . . . . . . . . . . . . . . . . . . . 323
Figure 17.6b Vertical Calibration Line . . . . . . . . . . . . . . . . . . . . . . . . . . . . 324
Figure 17.6c Calibration Line Distance Prompt . . . . . . . . . . . . . . . . . . . . . 324
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