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xii
Dimension 3100 Manual
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375
376
Dimension 3100 Manual
1
Ta ble of Contents
3
List of Figures
13
Chapter 1 System Overview
21
1.1 System Overview
22
1.2 Control Station Overview
23
1.2.2 Computer
24
Control Station Overview
25
Dimension 3100 SPM Overview
27
1.3.3 Stage System
29
1.3.4 Dimension SPM Head
29
1.3.5 Cantilever Holder
33
1.3.6 Video Zoom Microscope
34
Sample Size & Handling
35
1.5 Facilities Specifications
36
1.6 Applications
36
Chapter 2 Safety
37
2.1 Safety Requirements
39
2.2 Safety Precautions
40
Safety Precautions
41
2.2.2 Microscope
43
2.3 Ergonomics
46
2.4 Environmental Conditions
47
2.6.1 Pre Power-up Checklist
48
Connections
49
Final Installation
50
Power-up (Installation Only)
51
2.8 Software Power-up
52
2.8.2 Log On
53
2.8.4 Select Realtime
54
2.9 Hazard Labels
55
2.9.1 Laser Warning Labels
56
3.1 Optional Configurations
58
3.1.2 VT-102
59
3.1.3 IS3K-2
60
3.2 Facilities Requirements
61
External Vacuum
62
Supply Module
62
Facilities Requirements
63
Top View
66
Side and Front View
66
Front View
67
3.3.5 ELCON Console
68
1959-940-A
70
General Facilities Guidelines
71
Chapter 4 Installation
73
4.1 Shipping and Receiving
74
Shipping and Receiving
75
4.2 Uncrating the System
76
Chuck Base
78
Keyboard MouseTrackball
79
Installation
81
OK twice
82
NanoScope® IIIa
83
NanoScope®
85
4.5 System Power-up
88
Chapter 5 Stage System
89
5.1 Mounting of Samples
90
Mounting of Samples
91
5.2 Stage Menu Commands
92
5.2.2 Locate Tip
93
5.2.3 Focus Surface
94
5.2.4 Move To (X,Y)
96
5.2.5 Set Reference
97
Set Reference
98
X Axis Y AxisOrigin ResetQuit
98
5.2.6 Programmed Move
99
Stage Menu Commands
102
5.2.7 Initialize
103
5.2.8 SPM Parameters
105
6.1.1 Wafer Tool Kit
108
6.1.2 Cantilever Preparation
108
Silicon Cantilever Substrates
109
Press here to break out strip
113
Lever Type
116
Scanning Profile
117
Preparation
119
7.1 System Information
120
7.1.3 Laser Requirements
121
7.2 Basic AFM Operation
122
Basic AFM Operation
123
7.2.9 Align Laser
126
7.2.10 Adjust Photodetector
131
7.2.11 Locate Tip
133
7.2.12 Load the Sample
134
7.2.13 Focus Surface
135
7.3 Advanced AFM Operation
137
Advanced AFM Operation
138
Chapter 8 Contact AFM
139
8.1.1 Select the Microscope
140
8.1.4 Align Laser
140
8.1.5 Adjust Photodetector
141
8.1.6 Locate Tip
141
8.1.7 Focus Surface
141
8.1.8 Show All Items
142
8.1.10 Engage
145
8.2.1 Cantilever Selection
145
Approach
146
Jump to contact
146
Adhesion
146
Pull-off
146
8.3.1 Data Type
147
8.3.2 Gain Settings
148
8.3.3 Scan Size and Scan Rate
149
8.3.4 Setpoint
149
8.3.5 Lowpass Filter
149
8.3.6 Highpass Filter
149
8.4 Force Calibration Mode
150
Chapter 9 TappingMode AFM
151
9.1 Principles of TappingMode
152
Return signal
153
(deflected)
153
Laser beam
153
Sample surface
153
9.2.3 Align Laser
154
9.2.4 Adjust Photodetector
154
9.2.5 Locate Tip
154
9.2.6 Focus Surface
155
9.2.7 Cantilever Tune
155
Frequency Sweep
158
9.2.8 Show All Items
159
9.2.10 Engage
161
9.3 Withdraw the Tip
162
9.4.1 Resonating Techniques
163
9.4.2 Cantilever Oscillation
163
50.00 nm/div
164
Scan Size - 2.50 µm/div
164
Drive Frequency
165
9.4.5 Data Type
166
9.4.6 Gain Settings
166
9.4.8 Surface Tune
167
9.5 Troubleshooting
168
Chapter 10 Fluid Imaging
169
10.1 Basic Principles
171
10.2 Fluid Operation Hardware
171
10.2.2 Tip Suggestions
172
10.3 Sample Mounting
173
10.3.2 Larger Samples
174
10.3.3 Smaller Samples
174
10.4 Precautions
175
Precautions
176
10.5 Operating Principles
177
Operating Principles
178
10.5.6 Align Laser
179
10.5.7 “False” Reflections
180
10.5.8 Load Sample
180
10.5.9 Lower Probe into Fluid
182
10.5.11 Adjust Photodetector
182
10.5.12 Locate Tip
183
10.5.13 Focus Surface
183
10.5.15 Show All Items
189
10.5.17 Engage
191
10.6 Troubleshooting
193
Troubleshooting
194
Microscopy (STM)
195
11.1 Introduction
196
11.2 Basic STM Operation
197
Basic STM Operation
198
parameters
200
11.3.1 STM Hardware
201
11.3.3 STM Operating Modes
202
Sensitivity (Å/V)
206
11.4.1 Operation of STS
207
11.6 Etching Tungsten Tips
212
Etching Tungsten Tips
213
12.1 Introduction
215
12.2 Basic LFM Operation
216
12.3 Advanced LFM Operation
217
12.3.2 Tip selection
218
High Friction
219
Low Friction
219
Advanced LFM Operation
220
Chapter 13 Force Imaging
223
13.1 Force Plots–An Analogy
224
Force Plots–An Analogy
225
13.2 Force Calibration Mode
226
Force Calibration Mode
227
13.2.1 Example Force Plot
229
Y Offset
233
13.3.3 Channel 1, 2, 3 Panels
235
Total Force
237
End Mode
238
13.3.6 Menu Bar Commands
239
Piezo travel
240
Position
240
13.4.2 Helpful Suggestions
242
13.4.3 Advanced Techniques
243
13.5.1 Force Plots
248
13.5.3 High Contact Force
252
13.5.4 Tip Selection
252
13.6 Force Modulation
253
Force Modulation
254
13.6.3 Operating Principle
255
13.6.5 Notes About Artifacts
261
13.8 Force Volume
265
Interleave Mode Description
269
14.3 LiftMode Description
270
14.5.2 Setpoint Selection
272
Magnetic Force Microscopy
276
15.2 Basic MFM Operation
278
Basic MFM Operation
279
15.3 Advanced MFM Operation
284
15.3.3 Drive Amplitude
285
Advanced MFM Operation
286
15.4.1 Phase Extender Module
288
15.4.2 Quadrex Extender
289
15.4.3 NanoScope IV
289
15.6 Troubleshooting
290
Electric Techniques Overview
293
Electric Force Microscopy
295
NanoScope
299
16.2.4 Phase Detection
311
16.2.5 Frequency Modulation
313
16.2.6 Amplitude Detection
313
EFM Troubleshooting/Pointers
315
16.3.8 Try Uncoated Si Tip
316
Chapter 17 Calibration
325
Section 17.8.6
326
17.1 SPM Calibration Overview
327
SPM Calibration Overview
329
17.2 Calibration Setup
332
Scan Angle = 0°
333
17.2.4 Set Up Contact AFM
334
17.3.1 Measure Orthogonality
334
Check Sample Orthogonality
335
17.4 Linearity Correction
336
Linearity Correction
337
17.4.2 Adjust Fast mag1
339
17.4.3 Adjust Slow mag1
340
Autocalibration
341
SKIP to
342
17.6 Autocalibration
343
Draw a horizontal line
347
17.8 Calibrating Z
351
Calibrating Z
352
17.8.4 Correct Z Sensitivity
355
18.1 Maintenance
358
Maintenance
359
18.1.2 Calibration
360
18.1.5 Air Tables
364
18.1.6 Air Pressure
364
18.1.7 Air Table Feet
364
18.1.8 Optics Zoom System
365
18.2 Troubleshooting
366
18.2.2 Common Problems
368
18.3 Warranty
369
Warranty
370
136, 167
374
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