Dell 3100 Spezifikationen

Document Revision History: DImension 3100 Manual Revision Date Section(s) AffectedRef. DCRApproval D 03/09/04 All. N/A C. KowalskiC 05/15/03 Fluid Ce

x Dimension 3100 Manual Rev. D15.4 Installation of the Electronics Modules . . . . . . . . . . . . . . . . . . . . . . . 26815.4.1 Phase Extender

Stage SystemStage Menu Commands80 Dimension 3100 Manual Rev. DTeaching a Programmed MoveTo program (teach) a series of moves, complete the following:1

Stage SystemStage Menu CommandsRev. D Dimension 3100 Manual 817. Click on OK in the Teach Mode panel when the stage has moved to a desired position (s

Stage SystemStage Menu Commands82 Dimension 3100 Manual Rev. DTo insert a step into an existing program sequence:6. Go to the Stage pop-down menu to t

Stage SystemStage Menu CommandsRev. D Dimension 3100 Manual 833. Select the Run option. If you are loading and running the program from the beginning,

Stage SystemStage Menu Commands84 Dimension 3100 Manual Rev. DFigure 5.2p Stage Initialize/Cancel Prompt3. To begin initialization, click Initialize

Stage SystemStage Menu CommandsRev. D Dimension 3100 Manual 85/(86 Blank)7. Finally, the camera’s optics zooms out. When the camera zooms out to the l

Rev. D Dimension 3100 Manual 87Chapter 6 Cantilever PreparationThe Dimension 3100 Scanning Probe Microscope comes furnished with etched silicon cant

Cantilever PreparationSilicon Cantilever Substrates88 Dimension 3100 Manual Rev. D6.1 Silicon Cantilever Substrates 6.1.1 Wafer Tool KitA wafer tool k

Cantilever PreparationSilicon Cantilever SubstratesRev. D Dimension 3100 Manual 89Note: Cover the petri dish when not in use.Figure 6.1a Silicon Can

Rev. D Dimension 3100 Manual xi17.3 Check Sample Orthogonality . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31417.3.1 Measure Ort

Cantilever PreparationSilicon Cantilever Substrates90 Dimension 3100 Manual Rev. D6.1.3 Tip Shape of Etched Silicon ProbesEtched silicon probes provid

Cantilever PreparationSilicon Cantilever SubstratesRev. D Dimension 3100 Manual 91Figure 6.1c Silicon Probe Tip Profile Artifact (Front-to-Back)To me

Cantilever PreparationSilicon Cantilever Substrates92 Dimension 3100 Manual Rev. DFigure 6.1d Silicon Probe Tip Step Profile Artifact (Side-to-Side)M

Cantilever PreparationSilicon Nitride Cantilever SubstratesRev. D Dimension 3100 Manual 93In addition to microscopic scale shape characteristics (see

Cantilever PreparationSilicon Nitride Cantilever Substrates94 Dimension 3100 Manual Rev. D5. Place the strip down on a white piece of paper to inspect

Cantilever PreparationSilicon Nitride Cantilever SubstratesRev. D Dimension 3100 Manual 95Figure 6.2b Substrate Break-offNote: Extra substrates are

Cantilever PreparationSilicon Nitride Cantilever Substrates96 Dimension 3100 Manual Rev. D6.2.1 Tip Shape of Silicon Nitride ProbesSilicon nitride pro

Cantilever PreparationSilicon Nitride Cantilever SubstratesRev. D Dimension 3100 Manual 97/(96 Blank)Figure 6.2d Silicon Nitride Cantilevers (profile

Rev. D Dimension 3100 Manual 99Chapter 7 Head, Probe, & Sample PreparationThis chapter includes information regarding the Dimension 3100 Scannin

xii Dimension 3100 Manual Rev. D

Head, Probe, & Sample PreparationSystem Information100 Dimension 3100 Manual Rev. D• Load the Sample: Section 7.2.12• Focus Surface: Section 7.2.1

Head, Probe, & Sample PreparationSystem InformationRev. D Dimension 3100 Manual 1017.1.3 Laser RequirementsThis instrument uses a semiconductor la

Head, Probe, & Sample PreparationBasic AFM Operation102 Dimension 3100 Manual Rev. D7.2 Basic AFM Operation7.2.1 Select the Microscope1. Set the m

Head, Probe, & Sample PreparationBasic AFM OperationRev. D Dimension 3100 Manual 103Figure 7.2b Cantilever Holder Stand (top view)Note: You may

Head, Probe, & Sample PreparationBasic AFM Operation104 Dimension 3100 Manual Rev. DFigure 7.2c Standard AFM Cantilever Holder4. Orient the cant

Head, Probe, & Sample PreparationBasic AFM OperationRev. D Dimension 3100 Manual 1057.2.5 Remove the Dimension SPM Head1. Tighten the screw locate

Head, Probe, & Sample PreparationBasic AFM Operation106 Dimension 3100 Manual Rev. D1. Mate the cantilever holder sockets to the Dimension SPM hea

Head, Probe, & Sample PreparationBasic AFM OperationRev. D Dimension 3100 Manual 107Figure 7.2e Dimension Head Laser Control KnobsThe X directio

Head, Probe, & Sample PreparationBasic AFM Operation108 Dimension 3100 Manual Rev. D2. Verify the laser beam is visible on the surface below. If i

Head, Probe, & Sample PreparationBasic AFM OperationRev. D Dimension 3100 Manual 109Figure 7.2g Photodetector Adjustment KnobsNote: You may now

Rev. D Dimension 3100 Manual xiiiList of FiguresChapter 1 System Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Head, Probe, & Sample PreparationBasic AFM Operation110 Dimension 3100 Manual Rev. D3. Turn the rear-right laser control knob clockwise to move th

Head, Probe, & Sample PreparationBasic AFM OperationRev. D Dimension 3100 Manual 111Note: During this step do not adjust the back-right laser knob

Head, Probe, & Sample PreparationBasic AFM Operation112 Dimension 3100 Manual Rev. DFigure 7.2i Vision System Window3. Center the laser detector

Head, Probe, & Sample PreparationBasic AFM OperationRev. D Dimension 3100 Manual 113Figure 7.2j Photodetector Mirror Adjustment Knobs7.2.11 Loca

Head, Probe, & Sample PreparationBasic AFM Operation114 Dimension 3100 Manual Rev. D7.2.12 Load the SampleIf it is your first time operating the mi

Head, Probe, & Sample PreparationBasic AFM OperationRev. D Dimension 3100 Manual 115Figure 7.2l Securing the Sample5. Secure the sample atop the

Head, Probe, & Sample PreparationBasic AFM Operation116 Dimension 3100 Manual Rev. D7.2.14 Cantilever Tune (TappingMode only)1. Select Cantilever

Head, Probe, & Sample PreparationAdvanced AFM OperationRev. D Dimension 3100 Manual 1177.2.16 Engage• Select Motor > Engage, or click the Engag

Head, Probe, & Sample PreparationAdvanced AFM Operation118 Dimension 3100 Manual Rev. DFigure 7.3a Default SPM Stage ParametersDefinitions of Sta

Rev. D Dimension 3100 Manual 119Chapter 8 Contact AFMThis chapter covers procedures for operating the Dimension 3100 Scanning Probe Microscope (SPM)

List of Figuresxiv Dimension 3100 Manual Rev. DFigure 3.3c IS3K-2 - Top View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

Contact AFMBasic Contact Mode AFM Operation120 Dimension 3100 Manual Rev. D• Lowpass Filter: Section 8.3.5• Highpass Filter: Section 8.3.6• Force Cali

Contact AFMBasic Contact Mode AFM OperationRev. D Dimension 3100 Manual 1218.1.5 Adjust Photodetector1. Adjust the photodetector so that the red dot m

Contact AFMBasic Contact Mode AFM Operation122 Dimension 3100 Manual Rev. D8.1.8 Show All ItemsBefore changing any parameters, you should display all

Contact AFMBasic Contact Mode AFM OperationRev. D Dimension 3100 Manual 1238.1.9 Set Initial Scan ParametersScan Controls PanelIn the Scan Controls pa

Contact AFMBasic Contact Mode AFM Operation124 Dimension 3100 Manual Rev. DFeedback Controls Panel1. Set the Integral gain to 2.0 and the Proportional

Contact AFMAdvanced Atomic Force OperationRev. D Dimension 3100 Manual 1258.1.10 Engage1. Select Motor > Engage. A pre-engage check begins, followe

Contact AFMAdvanced Atomic Force Operation126 Dimension 3100 Manual Rev. Dthickness of both cantilevers are equal. The calculated spring-constant for

Contact AFMOptimization of Scanning ParametersRev. D Dimension 3100 Manual 127Note: The smaller end radius of etched silicon tips creates greater forc

Contact AFMOptimization of Scanning Parameters128 Dimension 3100 Manual Rev. DCollect Deflection data with low feedback gains to ensure the piezo remai

Contact AFMOptimization of Scanning ParametersRev. D Dimension 3100 Manual 1298.3.3 Scan Size and Scan RateIn general, decrease the Scan rate as the S

List of FiguresRev. D Dimension 3100 Manual xvFigure 5.2r Stage Initializing Prompt. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .84Fig

Contact AFMForce Calibration Mode130 Dimension 3100 Manual Rev. D8.4 Force Calibration ModeThe Force Calibration command in the View > Force Mode &

Rev. D Dimension 3100 Manual 131Chapter 9 TappingMode AFMThis chapter details procedures for operating the Dimension 3100 SPM in TappingMode in air.

TappingMode AFMPrinciples of TappingMode132 Dimension 3100 Manual Rev. D• Decreasing the Cantilever Drive Frequency: Section 9.4.3• Optimization of Sc

TappingMode AFMBasic TappingMode AFM OperationRev. D Dimension 3100 Manual 133Figure 9.1b represents the same cantilever at the sample surface. Althou

TappingMode AFMBasic TappingMode AFM Operation134 Dimension 3100 Manual Rev. D9.2.2 Head, Cantilever and Sample Preparation• Install an etched single

TappingMode AFMBasic TappingMode AFM OperationRev. D Dimension 3100 Manual 1359.2.6 Focus Surface1. Select Stage > Focus Surface or click the Focus

TappingMode AFMBasic TappingMode AFM Operation136 Dimension 3100 Manual Rev. DAutomatic TuningFor most purposes, the Auto Tune function will suffice.•V

TappingMode AFMBasic TappingMode AFM OperationRev. D Dimension 3100 Manual 137Note: The Offset command sets the center frequency equal to the cursor p

TappingMode AFMBasic TappingMode AFM Operation138 Dimension 3100 Manual Rev. DFigure 9.2c Cantilever Tune Frequency Sweep11. Click OK. The parameter

TappingMode AFMBasic TappingMode AFM OperationRev. D Dimension 3100 Manual 1399.2.8 Show All ItemsBefore changing any parameters, you should display a

List of Figuresxvi Dimension 3100 Manual Rev. DFigure 9.2a Auto Tune Control Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 136Figu

TappingMode AFMBasic TappingMode AFM Operation140 Dimension 3100 Manual Rev. D9.2.9 Set Initial Scan ParametersScan Controls PanelIn the Scan Controls

TappingMode AFMBasic TappingMode AFM OperationRev. D Dimension 3100 Manual 141Feedback Controls Panel• Set the Integral gain to 0.5 and the Proportion

TappingMode AFMWithdraw the Tip142 Dimension 3100 Manual Rev. D9.2.11 Optimize Scan ParametersThe procedure to optimize the scan parameters is similar

TappingMode AFMAdvanced TappingMode AFM OperationRev. D Dimension 3100 Manual 1439.4 Advanced TappingMode AFM OperationThis section discusses the more

TappingMode AFMAdvanced TappingMode AFM Operation144 Dimension 3100 Manual Rev. Dmore rapidly. The feedback system senses the error caused by going of

TappingMode AFMAdvanced TappingMode AFM OperationRev. D Dimension 3100 Manual 145Figure 9.4c Scope Trace with Correct Scan Rate9.4.3 Decreasing the

TappingMode AFMAdvanced TappingMode AFM Operation146 Dimension 3100 Manual Rev. D9.4.4 Optimization of Scanning ParametersThe user is encouraged to re

TappingMode AFMAdvanced TappingMode AFM OperationRev. D Dimension 3100 Manual 147The Setpoint parameter defines the desired voltage for the feedback lo

TappingMode AFMTroubleshooting148 Dimension 3100 Manual Rev. D9.5 Troubleshooting9.5.1 Frequency Response PlotIf a peak in the frequency response plot

Rev. D Dimension 3100 Manual 149Chapter 10 Fluid ImagingThe imaging of samples under fluid is an ever-increasing realm for SPM technology. Imaging sam

List of FiguresRev. D Dimension 3100 Manual xviiFigure 13.2c Tip-Sample Interaction During a Force Plot . . . . . . . . . . . . . .208Figure 13.2d A

Fluid Imaging150 Dimension 3100 Manual Rev. D• Load the Probe: Section 10.5.3• Install the Fluid Tip Holder: Section 10.5.4• Install the Protective Sk

Fluid ImagingBasic PrinciplesRev. D Dimension 3100 Manual 15110.1 Basic PrinciplesAttractive forces due to surface tension effects are eliminated when

Fluid ImagingFluid Operation Hardware152 Dimension 3100 Manual Rev. DFigure 10.2a Fluid Tip Holder10.2.2 Tip SuggestionsSoft cantilevers, particular

Fluid ImagingSample MountingRev. D Dimension 3100 Manual 15310.2.3 Rubber Protective SkirtA rubber protective skirt (see Figure 10.2b) is also provide

Fluid ImagingSample Mounting154 Dimension 3100 Manual Rev. D10.3.2 Larger SamplesFor larger samples, it may be desirable to image a small region under

Fluid ImagingPrecautionsRev. D Dimension 3100 Manual 15510.4 Precautions10.4.1 Spillage PrecautionsThroughout all procedures outlined in the following

Fluid ImagingPrecautions156 Dimension 3100 Manual Rev. DCAUTION: When imaging fluid samples, use extraordinary precautions against spillage. Fluids mu

Fluid ImagingOperating PrinciplesRev. D Dimension 3100 Manual 15710.5 Operating Principles10.5.1 Clean Fluid Cell and Protective SkirtTo reduce contam

Fluid ImagingOperating Principles158 Dimension 3100 Manual Rev. DNote: When pushing down on the holder, the steel wire in the docking station will pre

Fluid ImagingOperating PrinciplesRev. D Dimension 3100 Manual 15910.5.5 Install the Protective SkirtThe protective skirt is a rubber seal used to prot

List of Figuresxviii Dimension 3100 Manual Rev. DFigure 16.2a Comparison of Attractive and Repulsive Forces . . . . . . . . . . 275Figure 16.2b Dia

Fluid ImagingOperating Principles160 Dimension 3100 Manual Rev. D10.5.7 “False” ReflectionsThe cantilever substrate rests on a smooth, angled, glass su

Fluid ImagingOperating PrinciplesRev. D Dimension 3100 Manual 161Remount the Dimension HeadWith the sample prepared and positioned on the stage, slowl

Fluid ImagingOperating Principles162 Dimension 3100 Manual Rev. D10.5.9 Lower Probe into FluidLower the head, allowing the fluid tip holder to enter th

Fluid ImagingOperating PrinciplesRev. D Dimension 3100 Manual 163Note: The difference between the vertical deflection before engaging and the setpoint

Fluid ImagingOperating Principles164 Dimension 3100 Manual Rev. D6. Adjust laser alignment in photodetectorFluid changes the optical path length as th

Fluid ImagingOperating PrinciplesRev. D Dimension 3100 Manual 165Focus Surface Procedure1. Use the Stage > Focus Surface command to bring the sampl

Fluid ImagingOperating Principles166 Dimension 3100 Manual Rev. Ddamped. Instead, this step is used to find an oscillating frequency specific to the flui

Fluid ImagingOperating PrinciplesRev. D Dimension 3100 Manual 1677. Center the peak on the frequency sweep plot shown on the display monitor using the

Fluid ImagingOperating Principles168 Dimension 3100 Manual Rev. D10. Adjust the Drive amplitude until obtaining an RMS Amplitude of 0.3 - 0.6V. This v

Fluid ImagingOperating PrinciplesRev. D Dimension 3100 Manual 16910.5.15 Show All ItemsBefore changing any parameters, you should display all of the a

List of FiguresRev. D Dimension 3100 Manual xixFigure 17.7a Calibration Horizontal Reference . . . . . . . . . . . . . . . . . . . . . .327Figure 17.

Fluid ImagingOperating Principles170 Dimension 3100 Manual Rev. D10.5.16 Set Initial Scan ParametersScan Controls PanelIn the Scan Controls panel, set

Fluid ImagingOperating PrinciplesRev. D Dimension 3100 Manual 17110.5.17 Engage1. Select Motor > Engage. A pre-engage check begins, followed by Z-s

Fluid ImagingOperating Principles172 Dimension 3100 Manual Rev. DTappingModeUsually the best images are obtained at setpoints 5-10 percent less than t

Fluid ImagingTroubleshootingRev. D Dimension 3100 Manual 17310.6 Troubleshooting10.6.1 Cantilever Tune Plot Looks PoorBecome familiar with the charact

Fluid ImagingTroubleshooting174 Dimension 3100 Manual Rev. D10.6.4 Unable to Locate Particulate SamplesSome particulate samples (i.e., proteins) may p

Rev. D Dimension 3100 Manual 175Chapter 11 Scanning Tunneling Microscopy (STM)This chapter includes the following sections:• Introduction: Section 11

Scanning Tunneling Microscopy (STM)Introduction176 Dimension 3100 Manual Rev. D11.1 IntroductionSTM relies on “tunneling current” between the probe an

Scanning Tunneling Microscopy (STM)Basic STM OperationRev. D Dimension 3100 Manual 177Figure 11.1a Dimension Tip Holder and Head Connection11.2 Basi

Scanning Tunneling Microscopy (STM)Basic STM Operation178 Dimension 3100 Manual Rev. D4. Plug the loaded tip holder into the end of the Dimension head

Scanning Tunneling Microscopy (STM)Basic STM OperationRev. D Dimension 3100 Manual 179Click on the Scope Mode command in the View menu to see what the

Notices: The information in this document is subject to change without notice. NO WARRANTY OF ANY KIND IS MADE WITH REGARD TO THIS MATERIAL, INCLUDI

List of Figuresxx Dimension 3100 Manual Rev. D

Scanning Tunneling Microscopy (STM)STM-Specific Information and Operations180 Dimension 3100 Manual Rev. D8. After a clean image has been obtained, it

Scanning Tunneling Microscopy (STM)STM-Specific Information and OperationsRev. D Dimension 3100 Manual 18111.3.1 STM HardwareSome individual STM compon

Scanning Tunneling Microscopy (STM)STM-Specific Information and Operations182 Dimension 3100 Manual Rev. D11.3.2 Fine Points of STM OperationGetting th

Scanning Tunneling Microscopy (STM)STM-Specific Information and OperationsRev. D Dimension 3100 Manual 18311.3.4 STM-Specific Menu ParametersIn addition

Scanning Tunneling Microscopy (STM)STM-Specific Information and Operations184 Dimension 3100 Manual Rev. Dhigh will cause oscillations in the scope ima

Scanning Tunneling Microscopy (STM)STM-Specific Information and OperationsRev. D Dimension 3100 Manual 185Tunneling TipsAlthough the microscope will ac

Scanning Tunneling Microscopy (STM)STM-Specific Information and Operations186 Dimension 3100 Manual Rev. DVibration IsolationThe microscope should be i

Scanning Tunneling Microscopy (STM)Spectroscopy with the STMRev. D Dimension 3100 Manual 187Head OffsetThe value of the head preamplifier offset can be

Scanning Tunneling Microscopy (STM)Troubleshooting Operation of STM188 Dimension 3100 Manual Rev. DA comparison to STM imaging reveals two somewhat co

Scanning Tunneling Microscopy (STM)Troubleshooting Operation of STMRev. D Dimension 3100 Manual 18911.5.2 Head Engages ImmediatelyIf the STM engages i

Rev. D Dimension 3100 Manual 1Chapter 1 System OverviewThe Dimension 3100 Scanning Probe Microscope (SPM) produces high-resolution, three-dimensiona

Scanning Tunneling Microscopy (STM)Troubleshooting Operation of STM190 Dimension 3100 Manual Rev. Dresistance measurements. However, oxide and contami

Scanning Tunneling Microscopy (STM)Troubleshooting Operation of STMRev. D Dimension 3100 Manual 191Image is Streaky or WavyIf high-resolution images a

Scanning Tunneling Microscopy (STM)Etching Tungsten Tips192 Dimension 3100 Manual Rev. D11.6 Etching Tungsten TipsYou can purchase tungsten tips from

Scanning Tunneling Microscopy (STM)Etching Tungsten TipsRev. D Dimension 3100 Manual 1937. Place the tungsten tips into a holder. We like to use an IC

Scanning Tunneling Microscopy (STM)Etching Tungsten Tips194 Dimension 3100 Manual Rev. D

Rev. D Dimension 3100 Manual 195Chapter 12 Lateral Force ModeThis chapter includes the following sections:• Introduction: Section 12.1• Basic LFM Ope

Lateral Force ModeBasic LFM Operation196 Dimension 3100 Manual Rev. D12.2 Basic LFM Operation1. Set up and run the system in Contact mode as described

Lateral Force ModeAdvanced LFM OperationRev. D Dimension 3100 Manual 19712.3 Advanced LFM Operation12.3.1 Scan DirectionThe cantilever is most suscept

Lateral Force ModeAdvanced LFM Operation198 Dimension 3100 Manual Rev. D12.3.2 Tip selectionThe analog-to-digital converter on the auxiliary input ch

Lateral Force ModeAdvanced LFM OperationRev. D Dimension 3100 Manual 199Table 12.3a Key for LFM Example Above12.3.4 Understanding the Color ScaleLF

System OverviewSystem Overview2 Dimension 3100 Manual Rev. D• Sample Size & Handling: Section 1.4• Facilities Specifications: Section 1.5• Applicat

Lateral Force ModeAdvanced LFM Operation200 Dimension 3100 Manual Rev. D12.3.5 Using TMR Voltage to Measure FrictionThe signal called TMR (Trace minu

Lateral Force ModeAdvanced LFM OperationRev. D Dimension 3100 Manual 201/(198 Blank)12.3.7 Height Artifacts in the SignalLFM is subject to height art

Rev. D Dimension 3100 Manual 203Chapter 13 Force ImagingForce plots measure tip-sample interactions and determine optimal setpoints. More recently, m

Force ImagingForce Plots–An Analogy204 Dimension 3100 Manual Rev. D• Force Calibration (TappingMode): Section 13.5• Force Plots: Section 13.5.1• Obtai

Force ImagingForce Plots–An AnalogyRev. D Dimension 3100 Manual 205Figure 13.1a Comparative Index of Pulling ForcesThe pulling force is measured at

Force ImagingForce Calibration Mode206 Dimension 3100 Manual Rev. DThis oversimplified model depicts activity between SPM tips and various materials. I

Force ImagingForce Calibration ModeRev. D Dimension 3100 Manual 207Figure 13.2b Piezo Travel in Force Calibration ModeAs the piezo moves the tip up

Force ImagingForce Calibration Mode208 Dimension 3100 Manual Rev. DFigure 13.2c Tip-Sample Interaction During a Force Plot1234567

Force ImagingForce Calibration ModeRev. D Dimension 3100 Manual 20913.2.1 Example Force PlotA Contact Mode AFM force plot using a silicon nitride tip

System OverviewControl Station OverviewRev. D Dimension 3100 Manual 3Video Image Capture CapabilityVideo image capture capability allows the user to e

Force ImagingForce Calibration Mode210 Dimension 3100 Manual Rev. DFigure 13.2d Anatomy of a Force CurveThe horizontal axis plots the tip movement r

Force ImagingForce Calibration ModeRev. D Dimension 3100 Manual 211You can use force plots to adjust the setpoint so that minimal force is applied to

Force ImagingForce Calibration Control Panels and Menus212 Dimension 3100 Manual Rev. D13.3 Force Calibration Control Panels and MenusThe Force Calibr

Force ImagingForce Calibration Control Panels and MenusRev. D Dimension 3100 Manual 21313.3.1 Main Controls (Ramp Controls)Ramp Channel (Advanced Mode

Force ImagingForce Calibration Control Panels and Menus214 Dimension 3100 Manual Rev. DNumber of SamplesThis parameter defines the number of data point

Force ImagingForce Calibration Control Panels and MenusRev. D Dimension 3100 Manual 21513.3.3 Channel 1, 2, 3 PanelsData TypeThis parameter allows you

Force ImagingForce Calibration Control Panels and Menus216 Dimension 3100 Manual Rev. D13.3.4 Feedback Controls PanelAll of the parameters in the Feed

Force ImagingForce Calibration Control Panels and MenusRev. D Dimension 3100 Manual 21713.3.5 Scan Mode Panel (Advanced Mode Only)Trigger ModeThe Scan

Force ImagingForce Calibration Control Panels and Menus218 Dimension 3100 Manual Rev. DTrigger ThresholdThis parameter as well as the Trigger Directio

Force ImagingForce Calibration Control Panels and MenusRev. D Dimension 3100 Manual 219Ramp DelayThis parameter sets the amount of time to wait with t

System OverviewControl Station Overview4 Dimension 3100 Manual Rev. D1.2.2 ComputerThe computer is the main control unit of the Dimension 3100 SPM sys

Force ImagingForce Calibration (Contact Mode AFM)220 Dimension 3100 Manual Rev. DMotorThe Motor menu allows you to withdraw or manually control the ti

Force ImagingForce Calibration (Contact Mode AFM)Rev. D Dimension 3100 Manual 221discusses general approach adjustments to improve force curves obtain

Force ImagingForce Calibration (Contact Mode AFM)222 Dimension 3100 Manual Rev. D13.4.2 Helpful SuggestionsTo minimize or calculate the contact force

Force ImagingForce Calibration (Contact Mode AFM)Rev. D Dimension 3100 Manual 223Adjust PhotodiodeIn an analogous manner, you can use the photodiode p

Force ImagingForce Calibration (Contact Mode AFM)224 Dimension 3100 Manual Rev. DIf Sensitivity is calibrated on a material much stiffer than the cant

Force ImagingForce Calibration (Contact Mode AFM)Rev. D Dimension 3100 Manual 225Ramp size or offset the scan to a different area of the sample. Howev

Force ImagingForce Calibration (Contact Mode AFM)226 Dimension 3100 Manual Rev. DWhen the Data type is set to Height with the feedback gains set high,

Force ImagingForce Calibration (Contact Mode AFM)Rev. D Dimension 3100 Manual 22713.4.4 Interpreting Force CurvesAn examination of force curves can pr

Force ImagingForce Calibration (TappingMode)228 Dimension 3100 Manual Rev. D13.5 Force Calibration (TappingMode)Force Mode allows the imaging of force

Force ImagingForce Calibration (TappingMode)Rev. D Dimension 3100 Manual 229Figure 13.5a Piezo Extension Versus RMS Amplitude and DeflectionFigure 13

System OverviewControl Station OverviewRev. D Dimension 3100 Manual 51.2.3 NanoScope IIIa ControllerThe NanoScope IIIa controller controls the microsc

Force ImagingForce Calibration (TappingMode)230 Dimension 3100 Manual Rev. Dthe sample surface, the oscillation amplitude of the cantilever decreases

Force ImagingForce Calibration (TappingMode)Rev. D Dimension 3100 Manual 231Note: Collectively, these panels control tip-sample interactions. If any p

Force ImagingForce Calibration (TappingMode)232 Dimension 3100 Manual Rev. D13.5.3 High Contact ForceFigure 13.5c shows a curve produced when the tip

Force ImagingForce ModulationRev. D Dimension 3100 Manual 23313.6 Force Modulation13.6.1 IntroductionThis section describes the operation of force mod

Force ImagingForce Modulation234 Dimension 3100 Manual Rev. DFigure 13.6b Force Modulation Cantilever Holder13.6.2 Selecting a Force Modulation TipT

Force ImagingForce ModulationRev. D Dimension 3100 Manual 235Table 13.6a Force Modulation Tips13.6.3 Operating PrincipleForce modulation mode is ver

Force ImagingForce Modulation236 Dimension 3100 Manual Rev. D4. Install the cantilever holder on the Dimension SPM head.5. Align the laser on the cant

Force ImagingForce ModulationRev. D Dimension 3100 Manual 237Figure 13.6c Auto Tune Controls Paneld. Set the Drive frequency to 15kHz and the Sweep

Force ImagingForce Modulation238 Dimension 3100 Manual Rev. Df. Adjust the Sweep width, Data scale and the Drive amplitude until you can clearly see p

Force ImagingForce ModulationRev. D Dimension 3100 Manual 239Note: You may also change the Drive Frequency by clicking on the Drive Frequency paramete

System OverviewControl Station Overview6 Dimension 3100 Manual Rev. D1.2.4 Dimension 3100 ControllerThe Dimension 3100 controller controls the vacuum

Force ImagingForce Modulation240 Dimension 3100 Manual Rev. D18. Optimize Drive amplitude for Force Modulation imaging. The amount of contrast and the

Force ImagingForce ModulationRev. D Dimension 3100 Manual 24113.6.5 Notes About ArtifactsIt is possible to see artifacts in force modulation images th

Force ImagingForce Modulation242 Dimension 3100 Manual Rev. DFigure 13.6f Friction on Force Modulation ImagesTip ShapeThe amount of indentation into

Force ImagingForce Modulation with ‘Negative LiftMode’Rev. D Dimension 3100 Manual 24313.7 Force Modulation with ‘Negative LiftMode’A new form of forc

Force ImagingForce Modulation with ‘Negative LiftMode’244 Dimension 3100 Manual Rev. D13.7.2 Obtain a TappingMode ImageWhile negative LiftMode force m

Force ImagingForce VolumeRev. D Dimension 3100 Manual 245/(242 Blank)Note: If the Lift scan height is too large, the interleave may be tapping, and th

Rev. D Dimension 3100 Manual 247Chapter 14 Interleave ScanningThis chapter provides general information regarding the Interleave procedure and comman

Interleave ScanningPreface: Interleave Scanning & LiftMode248 Dimension 3100 Manual Rev. D14.1 Preface: Interleave Scanning & LiftModeInterlea

Interleave ScanningInterleave Mode DescriptionRev. D Dimension 3100 Manual 24914.2 Interleave Mode DescriptionEnabling Interleave changes the scan pat

System OverviewDimension 3100 SPM OverviewRev. D Dimension 3100 Manual 7The Dimension 3100 controller houses the following components:Power SupplyThe

Interleave ScanningLiftMode Description250 Dimension 3100 Manual Rev. D14.3 LiftMode DescriptionWith the Interleave scan option set to Lift, the motio

Interleave ScanningUse of LiftMode with TappingModeRev. D Dimension 3100 Manual 251Note that certain constraints are imposed: scan sizes, offsets, ang

Interleave ScanningUse of LiftMode with TappingMode252 Dimension 3100 Manual Rev. D14.5.2 Setpoint SelectionWhen the main and interleave Drive amplitu

Interleave ScanningUse of LiftMode with TappingModeRev. D Dimension 3100 Manual 253/(246 Blank)14.5.4 Amplitude Data InterpretationWhen monitoring amp

Rev. D Dimension 3100 Manual 255Chapter 15 Magnetic Force MicroscopyThis chapter describes how to perform Magnetic Force Microscopy (MFM) using the I

Magnetic Force MicroscopyMagnetic Force Microscopy256 Dimension 3100 Manual Rev. D• Troubleshooting: Section 15.6• MFM Image Verification: Section 15.6

Magnetic Force MicroscopyMagnetic Force MicroscopyRev. D Dimension 3100 Manual 25715.1.2 Amplitude Detection TechniquesAll standard Dimension-series S

Magnetic Force MicroscopyBasic MFM Operation258 Dimension 3100 Manual Rev. D15.2 Basic MFM OperationIn the instructions below, steps specific to phase

Magnetic Force MicroscopyBasic MFM OperationRev. D Dimension 3100 Manual 25915.2.2 Magnetic Force Microscopy Procedure1. Magnetize a NanoProbe magneti

System OverviewDimension 3100 SPM Overview8 Dimension 3100 Manual Rev. DFigure 1.3a D3100 Microscope Electronics Box (rear view)Note: Dimension 3100

Magnetic Force MicroscopyBasic MFM Operation260 Dimension 3100 Manual Rev. DTo correctly track the cantilever phase, the Phase offset parameter must b

Magnetic Force MicroscopyBasic MFM OperationRev. D Dimension 3100 Manual 261Figure 15.2c Cantilever Tune for Amplitude DetectionFigure 15.2d Shift

Magnetic Force MicroscopyBasic MFM Operation262 Dimension 3100 Manual Rev. D8. Under Scan Controls, set the Scan size to 5µm and Scan rate to 1–2Hz.9.

Magnetic Force MicroscopyBasic MFM OperationRev. D Dimension 3100 Manual 263Phase DetectionSet the Channel 2 image Data type to Phase; Z range to 3 de

Magnetic Force MicroscopyAdvanced MFM Operation264 Dimension 3100 Manual Rev. DTable 15.2a Frequency Modulation Gains Initial SettingsAs with topogr

Magnetic Force MicroscopyAdvanced MFM OperationRev. D Dimension 3100 Manual 265Figure 15.3a High-resolution Magnetic Force Gradient Image15.3.2 Fine

Magnetic Force MicroscopyAdvanced MFM Operation266 Dimension 3100 Manual Rev. Dimage. It is usually safe to increase the Drive Amplitude until the firs

Magnetic Force MicroscopyAdvanced MFM OperationRev. D Dimension 3100 Manual 267SetpointFor the most reproducible results, it is best to use a consiste

Magnetic Force MicroscopyInstallation of the Electronics Modules268 Dimension 3100 Manual Rev. D15.4 Installation of the Electronics Modules15.4.1 Pha

Magnetic Force MicroscopySoftware Setup Configuration (Phase, Quadrex or NSIV)Rev. D Dimension 3100 Manual 269Important Points1. Extender-compatible mi

System OverviewDimension 3100 SPM OverviewRev. D Dimension 3100 Manual 91.3.2 Optics and Motors OverviewThe optic system assists you in locating the c

Magnetic Force MicroscopyTroubleshooting270 Dimension 3100 Manual Rev. DNote: This step is not necessary for NanoScope IV.5. Click the Ok button when

Rev. D Dimension 3100 Manual 271Chapter 16 Electric TechniquesThis chapter describes how to perform two electric techniques: Electric Force Microscop

Electric Techniques272 Dimension 3100 Manual Rev. D• Optimize Tune in Interleave: Section 16.3.6• If Voltage is Needed, Use Analog 2 When Possible: Se

Electric TechniquesElectric Techniques OverviewRev. D Dimension 3100 Manual 27316.1 Electric Techniques OverviewThere are two types of electric techni

Electric TechniquesElectric Techniques Overview274 Dimension 3100 Manual Rev. DFigure 16.1b Extender Electronics ModuleIf applying a voltage to the

Electric TechniquesElectric Force MicroscopyRev. D Dimension 3100 Manual 27516.2 Electric Force Microscopy16.2.1 Electric Force Microscopy TheoryElect

Electric TechniquesElectric Force Microscopy276 Dimension 3100 Manual Rev. DFigure 16.2b Diagram of Extender Electronics Module for EFMIn many cases

Electric TechniquesElectric Force MicroscopyRev. D Dimension 3100 Manual 277Figure 16.2c Microscope BackplaneInstructions for Reconfiguring JumpersCa

Electric TechniquesElectric Force Microscopy278 Dimension 3100 Manual Rev. DSetting Analog 2 in the SoftwareIf you have chosen a configuration where An

Electric TechniquesElectric Force MicroscopyRev. D Dimension 3100 Manual 279Setting the Extender Electronics Box1. For systems with an Extender Electr

Rev. D Dimension 3100 Manual iii Ta ble of Contents Chapter 1 System Overview 1 1.1 System Overview . . . . . . . . . . . . . . . . . . . . . . . .

System OverviewDimension 3100 SPM Overview10 Dimension 3100 Manual Rev. DFigure 1.3b Dimension SPM HeadThe Dimension SPM head scans the tip and gene

Electric TechniquesElectric Force Microscopy280 Dimension 3100 Manual Rev. DJumper Configurations Without Extender ElectronicsAs shipped from the facto

Electric TechniquesElectric Force MicroscopyRev. D Dimension 3100 Manual 281Analog 2 Voltage Applied to the Tip (No Extender Electronics)The jumper co

Electric TechniquesElectric Force Microscopy282 Dimension 3100 Manual Rev. DAnalog 2 Voltage Applied to the Sample (No Extender Electronics)The jumper

Electric TechniquesElectric Force MicroscopyRev. D Dimension 3100 Manual 283External Voltage Source Applied to the Tip (No Extender Electronics)In som

Electric TechniquesElectric Force Microscopy284 Dimension 3100 Manual Rev. DExternal Voltage Source Applied to Sample (No Extender Electronics)In some

Electric TechniquesElectric Force MicroscopyRev. D Dimension 3100 Manual 285Jumper Configurations With Extender ElectronicsAs shipped from the factory,

Electric TechniquesElectric Force Microscopy286 Dimension 3100 Manual Rev. DAnalog 2 Voltage Applied to the Tip (With Extender Electronics)Notice that

Electric TechniquesElectric Force MicroscopyRev. D Dimension 3100 Manual 287Analog 2 Voltage Applied to Sample (With Extender Electronics)The jumper c

Electric TechniquesElectric Force Microscopy288 Dimension 3100 Manual Rev. DExternal Voltage Source Applied to Tip (With Extender Electronics)In some

Electric TechniquesElectric Force MicroscopyRev. D Dimension 3100 Manual 289External Voltage Source Applied to Sample (With Extender Electronics)In so

System OverviewDimension 3100 SPM OverviewRev. D Dimension 3100 Manual 11Adjustable Detector MirrorAn adjustable mirror positions the reflected laser s

Electric TechniquesElectric Force Microscopy290 Dimension 3100 Manual Rev. D16.2.3 Electric Force Microscopy ProceduresNote: Amplitude detection is th

Electric TechniquesElectric Force MicroscopyRev. D Dimension 3100 Manual 29116.2.4 Phase DetectionPhase Detection is only available when the Extender

Electric TechniquesElectric Force Microscopy292 Dimension 3100 Manual Rev. D3. Quit Auto Tune.4. Select Back to Image Mode.5. Engage the AFM and make

Electric TechniquesElectric Force MicroscopyRev. D Dimension 3100 Manual 29316.2.5 Frequency ModulationFor more quantitative results, use frequency mo

Electric TechniquesElectric Force Microscopy294 Dimension 3100 Manual Rev. DFigure 16.2r Amplitude Detection Cantilever Tune2. For maximum sensitivi

Electric TechniquesEFM Troubleshooting/PointersRev. D Dimension 3100 Manual 29516.3 EFM Troubleshooting/Pointers16.3.1 Use Low Setpoint When Tapping i

Electric TechniquesSurface Potential Detection—Theory296 Dimension 3100 Manual Rev. D16.3.6 Optimize Tune in InterleaveFind optimal lift height. Use V

Electric TechniquesSurface Potential Detection—TheoryRev. D Dimension 3100 Manual 297oscillating electrostatic force at the frequency ω on the cantile

Electric TechniquesSurface Potential Detection—Preparation298 Dimension 3100 Manual Rev. D16.5 Surface Potential Detection—PreparationIt is often desi

Electric TechniquesSurface Potential Detection—PreparationRev. D Dimension 3100 Manual 299Figure 16.5a Normal Jumper Configuration with Extender Elec

System OverviewDimension 3100 SPM Overview12 Dimension 3100 Manual Rev. DFigure 1.3d Dimension Head ScannerThe end of the scanner allows easy remova

Electric TechniquesSurface Potential Detection—Preparation300 Dimension 3100 Manual Rev. DAnalog 2 Voltage Applied to Sample (With Extender Electronic

Electric TechniquesSurface Potential Imaging—ProcedureRev. D Dimension 3100 Manual 30116.6 Surface Potential Imaging—Procedure1. Locate the two toggle

Electric TechniquesSurface Potential Imaging—Procedure302 Dimension 3100 Manual Rev. DVerify that all deposited metal adheres strongly to the silicon

Electric TechniquesSurface Potential Imaging—ProcedureRev. D Dimension 3100 Manual 303amplitude at zero. To do this, the feedback circuit uses the loc

Electric TechniquesSurface Potential Imaging—Procedure304 Dimension 3100 Manual Rev. D“Potential” signal), it is possible to use the lock-in signal to

Rev. D Dimension 3100 Manual 305Chapter 17 CalibrationThis chapter provides detailed instructions for the fine calibration of Digital Instruments Dime

Calibration306 Dimension 3100 Manual Rev. D• Fine-tuning for X-Y Calibration: Section 17.7• Prepare System for Fine-tuning: Section 17.7.1• Measure Ho

CalibrationSPM Calibration OverviewRev. D Dimension 3100 Manual 30717.1 SPM Calibration OverviewVeeco employs a software-guided calibration procedure

CalibrationSPM Calibration Overview308 Dimension 3100 Manual Rev. DTable 17.1a Calibration ScheduleNote: Small Scan Size Calibration: If using scan

CalibrationSPM Calibration OverviewRev. D Dimension 3100 Manual 309Figure 17.1a Scanner Crystal Voltage and Photodiode VoltageThe Microscope > Ca

System OverviewDimension 3100 SPM OverviewRev. D Dimension 3100 Manual 131.3.5 Cantilever HolderThe cantilever holder is a small printed circuit card

CalibrationSPM Calibration Overview310 Dimension 3100 Manual Rev. DFigure 17.1b Scanner Sensitivity CurveThis curve typifies scanner sensitivity acro

CalibrationSPM Calibration OverviewRev. D Dimension 3100 Manual 311Figure 17.1d Scanner Voltage and MovementThrough rigorous quality control of its

CalibrationCalibration Setup312 Dimension 3100 Manual Rev. D17.1.2 Calibration ReferencesAs described above, each scanner exhibits its own unique sens

CalibrationCalibration SetupRev. D Dimension 3100 Manual 31317.2.2 Align Calibration Reference1. Load the silicon calibration reference into the SPM.2

CalibrationCheck Sample Orthogonality314 Dimension 3100 Manual Rev. D17.2.4 Set Up Contact AFM1. Set the AFM mode to Contact.Note: The microscope can

CalibrationCheck Sample OrthogonalityRev. D Dimension 3100 Manual 315Note: In Figure 17.3a, pits align with the vertical (slow) axis but skew with the

CalibrationLinearity Correction316 Dimension 3100 Manual Rev. D17.4 Linearity CorrectionFor applications which demand good linearity, the following pr

CalibrationLinearity CorrectionRev. D Dimension 3100 Manual 3179. Align one side of the zoom box with desired features and observe how the other side

CalibrationLinearity Correction318 Dimension 3100 Manual Rev. D5. After setting Fast mag0 and Fast arg, insert the values for Slow mag0 and Slow arg.

CalibrationLinearity CorrectionRev. D Dimension 3100 Manual 319Adjusting Slow arg 1. Follow the same instructions for Fast arg.2. Adjust the zoom box

System OverviewDimension 3100 SPM Overview14 Dimension 3100 Manual Rev. DTable 1.3b Cantilever Holder SpecificationsFigure 1.3f Fluid Cell Cantile

CalibrationLinearity Correction320 Dimension 3100 Manual Rev. DFine AdjustmentInitial adjustment is usually adequate; however, if more precision is de

CalibrationX-Y Calibration using Capture Calibration and AutocalibrationRev. D Dimension 3100 Manual 32117.5 X-Y Calibration using Capture Calibration

CalibrationX-Y Calibration using Capture Calibration and Autocalibration322 Dimension 3100 Manual Rev. DFigure 17.5b Capture Control PromptNote: The

CalibrationAutocalibrationRev. D Dimension 3100 Manual 3239. Go to the Capture directory where all Capture Calibration files are saved.10. Select Offl

CalibrationAutocalibration324 Dimension 3100 Manual Rev. D4. For normal calibration, verify that all parameters are selected in the dialog box, then c

CalibrationAutocalibrationRev. D Dimension 3100 Manual 325due to the unusual movements employed during Capture Calibration scanning. Regardless, featu

CalibrationFine-tuning for X-Y Calibration326 Dimension 3100 Manual Rev. D17.7 Fine-tuning for X-Y CalibrationFine-tuning is usually performed at two

CalibrationFine-tuning for X-Y CalibrationRev. D Dimension 3100 Manual 327Figure 17.7a Calibration Horizontal Reference5. Verify that the microscope

CalibrationFine-tuning for X-Y Calibration328 Dimension 3100 Manual Rev. D8. Multiply the quotient obtained above by the X fast sens value shown on th

CalibrationFine-tuning for X-Y CalibrationRev. D Dimension 3100 Manual 32917.7.4 Measure Horizontally at 150 V Scan Size1. Verify that the Scan angle

System OverviewSample Size & HandlingRev. D Dimension 3100 Manual 15• Through-the-lens illumination• Color video camera •Focus tracking and automa

CalibrationFine-tuning for X-Y Calibration330 Dimension 3100 Manual Rev. D4. Return to the Scanner Calibration dialog box.5. Select the X fast derate

CalibrationCalibrating ZRev. D Dimension 3100 Manual 33117.8 Calibrating ZIn terms of obtaining accurate Z-axis measurements, it is generally not diffi

CalibrationCalibrating Z332 Dimension 3100 Manual Rev. D6. If the Z Center Position value is not close to zero, use the Realtime > Motor > Tip U

CalibrationCalibrating ZRev. D Dimension 3100 Manual 33317.8.3 Measure Vertical FeaturesWith the image corrected, its vertical features may now be mea

CalibrationCalibrating Z334 Dimension 3100 Manual Rev. D4. If the two peaks do not appear in the display, increase the Histogram filter cut off in the

CalibrationCalibrating ZRev. D Dimension 3100 Manual 33517.8.4 Correct Z SensitivityIf the depth of the pit on the 10µm silicon calibration reference

CalibrationCalibrating Z336 Dimension 3100 Manual Rev. D4. Record the measured depth. If the depth measured by the extended piezo is off by more than

Rev. D Dimension 3100 Manual 337Chapter 18 Maintenance, Troubleshooting and WarrantyThis chapter includes the following sections:• Maintenance: Secti

Maintenance, Troubleshooting and WarrantyMaintenance338 Dimension 3100 Manual Rev. D18.1 MaintenanceGenerally, the Dimension 3100 system requires very

Maintenance, Troubleshooting and WarrantyMaintenanceRev. D Dimension 3100 Manual 3396. Wipe the top and bottom of the manifold.7. Reconnect the manifo

System OverviewFacilities Specifications16 Dimension 3100 Manual Rev. D1.5 Facilities SpecificationsCompliance with the requirements and specifications o

Maintenance, Troubleshooting and WarrantyMaintenance340 Dimension 3100 Manual Rev. D18.1.2 CalibrationA description of the complete scanner calibratio

Maintenance, Troubleshooting and WarrantyMaintenanceRev. D Dimension 3100 Manual 34118.1.3 Changing the Illuminator Light BulbYou can change the illum

Maintenance, Troubleshooting and WarrantyMaintenance342 Dimension 3100 Manual Rev. D5. Remove the used bulb by unplugging the bulb cable and lifting t

Maintenance, Troubleshooting and WarrantyMaintenanceRev. D Dimension 3100 Manual 34318.1.4 Fuse Characteristics and Replacement• NanoScope Controller:

Maintenance, Troubleshooting and WarrantyMaintenance344 Dimension 3100 Manual Rev. D3. Using a screwdriver, press the slot in the fuse holder and rota

Maintenance, Troubleshooting and WarrantyMaintenanceRev. D Dimension 3100 Manual 34518.1.8 Optics Zoom SystemThe clutch in the zoom system can begin t

Maintenance, Troubleshooting and WarrantyTroubleshooting346 Dimension 3100 Manual Rev. D18.2 TroubleshootingThe Dimension 3100 system is very reliable

Maintenance, Troubleshooting and WarrantyTroubleshootingRev. D Dimension 3100 Manual 347•“Illuminator Error, Manual override is on” – The manual contr

Maintenance, Troubleshooting and WarrantyTroubleshooting348 Dimension 3100 Manual Rev. D18.2.2 Common ProblemsBent stage flexures – The X or Y stage fle

Maintenance, Troubleshooting and WarrantyWarrantyRev. D Dimension 3100 Manual 349The scanner plug is very durable and typically does not fail due to u

Rev. D Dimension 3100 Manual 17Chapter 2 SafetyThis chapter details the safety requirements involved in installation of the Dimension 3100 Scanning

Maintenance, Troubleshooting and WarrantyWarranty350 Dimension 3100 Manual Rev. D Warranty EligibilityTo be eligible for the above warranties, purchas

Rev. D Dimension 3100 Manual 351 IndexSymbols 12. 248AAirDimension 3100 controller 7Aliasing 241Amplitude 146Atomic Force Microscope (AFM)operator pre

Index352 Dimension 3100 Manual Rev. DDeflection 127Differential Signals 11Dimension 3100 Controllerair pump 7illumination 7power supply 7system overvi

IndexRev. D Dimension 3100 Manual 353safety 19thermal hazard 19IlluminationDimension 3100 controller 7Input and Display Devicescomputer 4keyboard 3mon

Index354 Dimension 3100 Manual Rev. Dsystem overview 5Number of samples 214OObjectiveoptics and motors overview 9video zoom 14Offset 136, 167Operator

IndexRev. D Dimension 3100 Manual 355precautions 26Samplesbiological 149—174chucks 70handling 15minimizing surface forces 224preparation 70, 114—115,

Index356 Dimension 3100 Manual Rev. DThermal Hazardsymbol 19Tip crash 118Tip Down 220, 222Tip Holder 10fluid 151installation fixture 104preparation 10

Safety18 Dimension 3100 Manual Rev. D• Software Power-up: Section 2.8• Log into Windows NT: Section 2.8.1• Log On: Section 2.8.2• Start the NanoScope

SafetySafety RequirementsRev. D Dimension 3100 Manual 192.1 Safety RequirementsFigure 2.1a Safety Symbols KeySymbol DefinitionThis symbol identifies c

iv Dimension 3100 Manual Rev. D 2.6.2 Turn on the Dimension 3100 SPM (Service and Installation Only) . . . . . . . 30 2.6.3 Power-up Checklist (Se

SafetySafety Precautions20 Dimension 3100 Manual Rev. D2.2 Safety PrecautionsBecause the Dimension 3100 SPM features independently motorized component

SafetySafety PrecautionsRev. D Dimension 3100 Manual 21CAUTION: Please contact Veeco before attempting to move the Dimension 3100 SPM system.ATTENTION

SafetySafety Precautions22 Dimension 3100 Manual Rev. DWARNING: The Dimension 3100 SPM contains a diode laser with an output of less than 1.0mW at 670

SafetySafety PrecautionsRev. D Dimension 3100 Manual 232.2.2 MicroscopeTo avoid operator injury and equipment damage, observe the following cautions r

SafetySafety Precautions24 Dimension 3100 Manual Rev. DCAUTION: Stage microscopes feature an automated X-Y stage and Z-axis capable of programmed move

SafetySafety PrecautionsRev. D Dimension 3100 Manual 25WARNING: Do not attempt repairs on electrical components. If it is necessary to enter the elect

SafetyErgonomics26 Dimension 3100 Manual Rev. D2.2.3 Sample Safeguards2.3 ErgonomicsThe Dimension 3100 SPM design promotes compatibility in the integr

SafetyEnvironmental ConditionsRev. D Dimension 3100 Manual 272.4 Environmental ConditionsEnvironmental conditions that may affect the performance of t

SafetyPower-up Sequence (Installation and Service Only)28 Dimension 3100 Manual Rev. D2.6.1 Pre Power-up Checklist Pre-Installation___

SafetyPower-up Sequence (Installation and Service Only)Rev. D Dimension 3100 Manual 29______ 4. Install the control station by completing the followin

Rev. D Dimension 3100 Manual v Chapter 5 Stage System 69 5.1 Mounting of Samples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

SafetyPower-up Sequence (Installation and Service Only)30 Dimension 3100 Manual Rev. D______ 25-pin D cable from computer to NanoScope controller_____

SafetyPower-Up Sequence (Normal Usage)Rev. D Dimension 3100 Manual 312.6.3 Power-up Checklist (Service and Installation Only)Power-up (Installation On

SafetySoftware Power-up32 Dimension 3100 Manual Rev. D2.7.2 Power-up Checklist (Normal Usage)Power-up (Normal Usage)_______ 1. Verify that all system

SafetySoftware Power-upRev. D Dimension 3100 Manual 33Figure 2.8a Log into Windows NT2.8.2 Log OnIn the Logon Information window, enter the default

SafetySoftware Power-up34 Dimension 3100 Manual Rev. DFigure 2.8b Logon Window2.8.3 Start the NanoScope SoftwareGo to the desktop and click on the N

SafetyHazard LabelsRev. D Dimension 3100 Manual 352.8.5 Begin Stage Initialization• Select Stage > Initialize.Note: Various axes of motion move to

SafetyHazard Labels36 Dimension 3100 Manual Rev. D2.9.1 Laser Warning LabelsLaser Explanatory LabelThe Laser Explanatory Label (see Figure 2.9a) indic

Rev. D Dimension 3100 Manual 37Chapter 3 Facilities RequirementsThis chapter details facility site requirements, safety requirements, and configurati

Facilities RequirementsOptional Configurations38 Dimension 3100 Manual Rev. D3.1 Optional ConfigurationsThe following are typical configurations for the

Facilities RequirementsOptional ConfigurationsRev. D Dimension 3100 Manual 393.1.2 VT-102This configuration consists of two basic elements: the VT-102 w

vi Dimension 3100 Manual Rev. D7.3 Advanced AFM Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1177.3.1 Stage Param

Facilities RequirementsOptional Configurations40 Dimension 3100 Manual Rev. D3.1.3 IS3K-2This configuration is comprised of one basic element, the IS3K-

Facilities RequirementsFacilities RequirementsRev. D Dimension 3100 Manual 413.2 Facilities RequirementsFigure 3.2a Dimension 3100 SPM Facility Requ

Facilities RequirementsAcoustic/Vibration Isolation Systems42 Dimension 3100 Manual Rev. D3.3 Acoustic/Vibration Isolation Systems3.3.1 IS3K-2 Dimensi

Facilities RequirementsAcoustic/Vibration Isolation SystemsRev. D Dimension 3100 Manual 43Figure 3.3b IS3K-2 - Side ViewFigure 3.3c IS3K-2 - Top V

Facilities RequirementsAcoustic/Vibration Isolation Systems44 Dimension 3100 Manual Rev. DFigure 3.3d IS3K-2 Leveling Feet Location - Bottom ViewFig

Facilities RequirementsAcoustic/Vibration Isolation SystemsRev. D Dimension 3100 Manual 453.3.2 VT-103-3K Dimensions, Utilities and ClearanceAn isolat

Facilities RequirementsAcoustic/Vibration Isolation Systems46 Dimension 3100 Manual Rev. DFigure 3.3h VT-103-3K - Top View with Acoustic Hood Closed

Facilities RequirementsAcoustic/Vibration Isolation SystemsRev. D Dimension 3100 Manual 473.3.4 Computer/Controller Facility RequirementsThe IS3K-2 al

Facilities RequirementsAcoustic/Vibration Isolation Systems48 Dimension 3100 Manual Rev. D3.3.5 ELCON ConsoleThe ELCON Console is available as an opti

Facilities RequirementsFacilities Requirements SummaryRev. D Dimension 3100 Manual 493.4 Facilities Requirements SummaryIf the Dimension 3100 system i

Rev. D Dimension 3100 Manual vii9.4.5 Data Type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Facilities RequirementsAcoustic/Vibration Specifications50 Dimension 3100 Manual Rev. D3.5 Acoustic/Vibration SpecificationsThe following conditions mus

Facilities RequirementsGeneral Facilities GuidelinesRev. D Dimension 3100 Manual 51/(54 Blank)3.6 General Facilities GuidelinesThe following list cont

Rev. D Dimension 3100 Manual 53Chapter 4 InstallationThis chapter details the installation procedure for the Dimension 3100 Scanning Probe Microscop

InstallationShipping and Receiving54 Dimension 3100 Manual Rev. D4.1 Shipping and Receiving4.1.1 Equipment RequirementsThe following equipment is nece

InstallationShipping and ReceivingRev. D Dimension 3100 Manual 55Cables Received• Controller-to-Dimension 3100 Cable, 37-pin D• Dimension 3100 DC Powe

InstallationUncrating the System56 Dimension 3100 Manual Rev. D4.2 Uncrating the System4.2.1 Uncrate the Dimension 3100 SPM System1. Using scissors, c

InstallationInstalling the Dimension 3100 SystemRev. D Dimension 3100 Manual 574.3 Installing the Dimension 3100 System4.3.1 Install the Dimension 310

InstallationInstalling the Dimension 3100 System58 Dimension 3100 Manual Rev. D8. Align the two sets of three mounting holes on the long edges of the

InstallationInstalling the Dimension 3100 SystemRev. D Dimension 3100 Manual 594.3.2 Install the Control Station1. Set up a table to be used as the co

viii Dimension 3100 Manual Rev. DChapter 11 Scanning Tunneling Microscopy (STM) 17511.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . .

InstallationConnecting the Dimension 3100 System60 Dimension 3100 Manual Rev. D4.4 Connecting the Dimension 3100 System4.4.1 Dimension 3100 Control St

InstallationConnecting the Dimension 3100 SystemRev. D Dimension 3100 Manual 61Figure 4.4a Computer (rear view)02912356Video 25Video 18USB port79COM

InstallationConnecting the Dimension 3100 System62 Dimension 3100 Manual Rev. DNote: The computer ships with the network board disabled to avoid error

InstallationConnecting the Dimension 3100 SystemRev. D Dimension 3100 Manual 63Connect the NanoScope ControllerNote: The NanoScope III and IIIa are ad

InstallationConnecting the Dimension 3100 System64 Dimension 3100 Manual Rev. DConnect the Dimension 3100 Controller1. Connect extensions to the Dimen

InstallationConnecting the Dimension 3100 SystemRev. D Dimension 3100 Manual 65Figure 4.4e Dimension 3100 Controller (front view)2. To set illuminat

InstallationConnecting the Dimension 3100 System66 Dimension 3100 Manual Rev. D4.4.2 Dimension 3100 Microscope External Components ConnectionsDimensio

InstallationConnecting the Dimension 3100 SystemRev. D Dimension 3100 Manual 672. Toggle the vacuum power switch, located on the front of the microsco

InstallationSystem Power-up68 Dimension 3100 Manual Rev. D4. Disconnect all cables from the Dimension 3100 microscope, and remove the cables from the

Rev. D Dimension 3100 Manual 69Chapter 5 Stage SystemThe Dimension 3100 Scanning Probe Microscope (SPM) features a large sample stage capable of pos

Rev. D Dimension 3100 Manual ix13.4.2 Helpful Suggestions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22213.4.

Stage SystemMounting of Samples70 Dimension 3100 Manual Rev. D5.1 Mounting of SamplesThere are two methods widely used for mounting samples: vacuum ch

Stage SystemMounting of SamplesRev. D Dimension 3100 Manual 715.1.3 Axis Orientation—Motorized X-Y StagesWhen viewing the Dimension 3100 SPM from the

Stage SystemStage Menu Commands72 Dimension 3100 Manual Rev. D5.2 Stage Menu CommandsImportant stage menu commands are discussed in detail in the foll

Stage SystemStage Menu CommandsRev. D Dimension 3100 Manual 732. To load a new sample, click OK. The head raises to the Load/Unload height, and the st

Stage SystemStage Menu Commands74 Dimension 3100 Manual Rev. DFigure 5.2c Locate Tip Prompt2. Bring the tip into focus by holding down the left trac

Stage SystemStage Menu CommandsRev. D Dimension 3100 Manual 75Figure 5.2d Focus Surface Prompt2. Use the left button on the trackball to focus on th

Stage SystemStage Menu Commands76 Dimension 3100 Manual Rev. D5.2.4 Move To (X,Y)This option enables the operator to quickly index the stage to a defin

Stage SystemStage Menu CommandsRev. D Dimension 3100 Manual 775. To exit the Move To (x,y) dialog box, click the Quit button.5.2.5 Set ReferenceThe Se

Stage SystemStage Menu Commands78 Dimension 3100 Manual Rev. DFigure 5.2g Set Reference Prompt3. Click Origin in the Set Reference panel; this is th

Stage SystemStage Menu CommandsRev. D Dimension 3100 Manual 79Figure 5.2i Resultant Reference Line5.2.6 Programmed MoveThe Programmed Move function