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Calibration

SPM Calibration Overview

Rev. D Dimension 3100 Manual 307

17.1 SPM Calibration Overview

Veeco employs a software-guided calibration procedure for all microscopes. The procedural details

of how calibration is executed using NanoScope software are beyond the scope of this document

and include proprietary methods exclusive to Veeco. A brief overview of the theory is available in

Section 17.1.1. The calibration is summarized in four basic steps outlined below.

• Orthogonality Adjustments: The orthogonality adjustment compensates for a possible

non-square scan pattern.

• Scanner Linearization: Adjust parameters for correcting the capacitive nature of the

piezo material and force the X-Y motion of the tip to move at a constant velocity.

• X, Y Calibration: Designate the software conversion values using one or both of the

following methods.

• Capture Calibration and Autocalibration: A built-in software routine

automatically controls the scanner while capturing a series of data ﬁles. The data

ﬁles are then used to “teach” the software the actual distance that the scanner

moved. This process creates a customized set of conversion values that will be used

to convert the known signals to a metric scale.

-or-

• Fine Tuning: Manually test and adjust X-Y sensitivity and derating values to within

1% accuracy. The conversion values that scale the scanner motion are conﬁrmed, or

are adjusted if necessary to within 1%. These same values should be adjusted by the

customer as the scanner ages due to use. A scanner will typically lose 10-20% of it’s

scan range over the ﬁrst year of typical use. The scanner will then become stable as

long as it is not damaged.

• Calibrate Z: Calibrate the Z scan tube to within 2%. A separate calibration “look-up”

table stores the conversion values for converting the control voltages applied to the Z

tube. These values are determined by scanning over a sample with a known depth.

Veeco recommends that you adhere to the following Calibration schedule (see Table 17.1a). After

initial installation, perform the Fine-Tuning X-Y Calibration (see Section 17.7) per the following

time schedule. If you ﬁnd that the calibration measurements are more than 10% off at any point

during Fine-Tuning Calibration, stop and perform the Full X-Y Calibration Routine (see Section

17.2). For most applications it is sufﬁcient to perform the Z calibration with the same frequency.

For critical height measurements we recommend monthly Z calibration.

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